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MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering by Tai-Ran Hsu

MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering

by Tai-Ran Hsu


ISBN 13: 9780470083017

Format: Illustrated (576 pages)
Publisher: Wiley
Published: 29 Apr 2008

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