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Nanoparticle Engineering for Chemical-mechanical Planarization Nanoparticle Engineering for Chemical-mechanical Planarization by Ungyu Paik, Jea-Gun Park

Nanoparticle Engineering for Chemical-mechanical Planarization

by Ungyu Paik, Jea-Gun Park


ISBN 13: 9781420059113

Format: Hardcover (221 pages)
Publisher: CRC Press
Published: 20 Feb 2009

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