Microelectromechanical Systems: Volume 1139: Materials and Devices II (MRS Proceedings)
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ISBN 13: 9781605111117
Format: Hardcover (247 pages) Publisher: Cambridge University Press Published: 23 Jun 2009
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Microelectromechanical Systems - Materials and Devices: Volume 1052 (MRS Proceedings)
ISBN 13: 9781558999909
Format: Hardcover (325 pages) Publisher: Materials Research Society Published: 17 Mar 2008