by VytautasOstasevicius (Author), RolanasDauksevicius (Author)
In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. This book provides coverage of the state-of-the-art of this rapidly developing field.
Format: Hardcover
Pages: 214
Edition: 1st Edition.
Publisher: Springer
Published: 11 Nov 2010
ISBN 10: 9048197007
ISBN 13: 9789048197002