by Maria Stepanova (Editor), StevenDew (Editor)
This volume updates scientists and engineers on the state of the art in various key techniques used to fabricate nanoscale structures. As well as covering lithographic creation of nano features, it focuses on new and revolutionary devices such as biosensors.
Format: Hardcover
Pages: 344
Edition: 2012
Publisher: Springer
Published: 09 Nov 2011
ISBN 10: 3709104238
ISBN 13: 9783709104231