Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments

Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments

by Alexey Ivanov (Author)

Synopsis

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.

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More Information

Format: Paperback
Pages: 348
Edition: 1st ed. 2018
Publisher: Springer Vieweg
Published: 22 Sep 2017

ISBN 10: 3658192372
ISBN 13: 9783658192372