by Alexey Ivanov (Author)
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.
Format: Paperback
Pages: 348
Edition: 1st ed. 2018
Publisher: Springer Vieweg
Published: 22 Sep 2017
ISBN 10: 3658192372
ISBN 13: 9783658192372