Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13-17, ... Series in Electronics and Photonics)

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Format: Paperback
Pages: 572
Edition: Softcover reprint of the original 1st ed. 1983
Publisher: Springer-Verlag
Published: 01 Jan 1983
ISBN 10: 3642691587
ISBN 13: 9783642691584