Niederdruckplasmen und Mikrostrukturtechnik

Niederdruckplasmen und Mikrostrukturtechnik

by Gerhard Franz (Author)

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More Information

Format: Paperback
Pages: 564
Edition: Softcover reprint of the original 3rd ed. 2004
Publisher: Springer
Published: 02 Dec 2003

ISBN 10: 3642622844
ISBN 13: 9783642622847