by Da Chen (Author), Da Chen (Author), Yafei Zhang (Author)
This book surveys the theory, design, fabrication and application multilayer integrated film bulk acoustic resonators. Covers use in integrated circuits, optical devices, acoustic resonators, micro-nano manufacturing, multilayer integration, and more.
Format: Hardcover
Pages: 164
Edition: 2013
Publisher: Springer
Published: 28 Aug 2012
ISBN 10: 3642317758
ISBN 13: 9783642317750
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