Rare-Earth Implanted MOS Devices for Silicon Photonics: Microstructural, Electrical and Optoelectronic Properties: 142 (Springer Series in Materials Science)

Rare-Earth Implanted MOS Devices for Silicon Photonics: Microstructural, Electrical and Optoelectronic Properties: 142 (Springer Series in Materials Science)

by Lars Rebohle (Author), Lars Rebohle (Author), Wolfgang Skorupa (Contributor)

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Format: Paperback
Pages: 192
Edition: 2010
Publisher: Springer
Published: 01 Dec 2012

ISBN 10: 3642265588
ISBN 13: 9783642265587