Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)

Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)

by JürgenHesselbach (Editor), StephanusBüttgenbach (Editor), Arne Burisch (Editor)

Synopsis

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516 where the focus is on active micro systems based on the electromagnetic actuator principle.

$224.73

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 456
Edition: 1st Edition.
Publisher: Springer
Published: 10 Mar 2011

ISBN 10: 3642129021
ISBN 13: 9783642129025