by JürgenHesselbach (Editor), StephanusBüttgenbach (Editor), Arne Burisch (Editor)
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516 where the focus is on active micro systems based on the electromagnetic actuator principle.
Format: Hardcover
Pages: 456
Edition: 1st Edition.
Publisher: Springer
Published: 10 Mar 2011
ISBN 10: 3642129021
ISBN 13: 9783642129025