by Ludwig Reimer (Author), P.W.Hawkes (Editor)
The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Format: Paperback
Pages: 527
Edition: 2nd completely rev. and updated ed.
Publisher: Springer
Published: 01 Dec 2010
ISBN 10: 3642083722
ISBN 13: 9783642083723