by N/A
This book presents the latest in Optical Metrology in Imaging, Surface Monitoring, Stress Analysis, Quality Control and related fields. Special emphasis is put on modern measurement strategies and new approaches for the extension of existing resolution limits.
Format: Hardcover
Pages: 818
Edition: 2009
Publisher: Springer
Published: 11 Sep 2009
ISBN 10: 3642030505
ISBN 13: 9783642030505