Reactive Sputter Deposition (Springer Series in Materials Science)

Reactive Sputter Deposition (Springer Series in Materials Science)

by Diederik Depla (Editor), StijnMahieu (Editor)

Synopsis

In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process.

$365.57

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 590
Edition: illustrated edition
Publisher: Springer
Published: 24 Apr 2008

ISBN 10: 3540766626
ISBN 13: 9783540766629