by Diederik Depla (Editor), StijnMahieu (Editor)
In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process.
Format: Hardcover
Pages: 590
Edition: illustrated edition
Publisher: Springer
Published: 24 Apr 2008
ISBN 10: 3540766626
ISBN 13: 9783540766629