CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS)

by Andreas Hierlemann (Author), Markus Graf (Author), Diego Barrettino (Author), HenryP.Baltes (Author)

• New

  Hardcover
  2007

  $164.12

  The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing.