Mechanical Microsensors (Microtechnology and MEMS)

Mechanical Microsensors (Microtechnology and MEMS)

by Miko Elwenspoek (Author), Miko Elwenspoek (Author), R. Wiegerink (Author)

Synopsis

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit- zerland, and developed and taught by the authors.

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20 in stock

More Information

Format: Illustrated
Pages: 308
Edition: 2001
Publisher: Springer
Published: 27 Nov 2000

ISBN 10: 3540675825
ISBN 13: 9783540675822