by Miko Elwenspoek (Author), Miko Elwenspoek (Author), R. Wiegerink (Author)
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit- zerland, and developed and taught by the authors.
Format: Illustrated
Pages: 308
Edition: 2001
Publisher: Springer
Published: 27 Nov 2000
ISBN 10: 3540675825
ISBN 13: 9783540675822