by RainerBehrisch (Editor), WolfgangEckstein (Editor)
Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems.
Format: Hardcover
Pages: 508
Edition: illustrated edition
Publisher: Springer
Published: 30 Jul 2007
ISBN 10: 3540445005
ISBN 13: 9783540445005