Chemical-Mechanical Planarization of Semiconductor Materials (Springer Series in Materials Science)

by M . R . Oliver (Editor)

• New

  Hardcover
  2004

  $221.27

  This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.