CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)

by D . Lange (Author), O.Brand (Author), H.Baltes (Author)

• New

  Hardcover
  2002

  $173.71

  This book is intended for scientists and engineers in the field of micro- and nano- electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.