CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)

CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications (Microtechnology and MEMS)

by D . Lange (Author), O.Brand (Author), H.Baltes (Author)

Synopsis

This book is intended for scientists and engineers in the field of micro- and nano- electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.

$173.45

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 158
Edition: illustrated edition
Publisher: Springer
Published: 23 Jul 2002

ISBN 10: 3540431438
ISBN 13: 9783540431435