This book is intended for scientists and engineers in the field of micro- and nano- electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.
Format: Hardcover
Pages: 158
Edition: illustrated edition
Publisher: Springer
Published: 23 Jul 2002
ISBN 10: 3540431438
ISBN 13: 9783540431435