Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models (Microtechnology and MEMS)

by JanG.Korvink (Author), TamaraBechtold (Author), EvgeniiB.Rudnyi (Author)

• New

  Hardcover
  2006

  $183.94

  This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.