Ion Implantation and Synthesis of Materials (Springer Series in Materials Science)

by Michael Nastasi (Author), JamesW.Mayer (Author)

New
Hardcover
2006
$184.49

Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.

Synopsis

Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.

$184.49

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 263
Publisher: Springer
Published: 09 Aug 2006
ISBN 10: 3540236740
ISBN 13: 9783540236740

Ion Implantation and Synthesis of Materials (Springer Series in Materials Science)

New

$184.49

Synopsis

$184.49

More Information