by Michael Nastasi (Author), JamesW.Mayer (Author)
Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.
Format: Hardcover
Pages: 263
Publisher: Springer
Published: 09 Aug 2006
ISBN 10: 3540236740
ISBN 13: 9783540236740