Ion Implantation and Synthesis of Materials (Springer Series in Materials Science)

Ion Implantation and Synthesis of Materials (Springer Series in Materials Science)

by Michael Nastasi (Author), JamesW.Mayer (Author)

Synopsis

Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.

$184.22

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 263
Publisher: Springer
Published: 09 Aug 2006

ISBN 10: 3540236740
ISBN 13: 9783540236740