Nanopositioning Technologies: Fundamentals and Applications

by YuSun (Editor), XinyuLiu (Editor), Changhai Ru (Editor)

• New

  Hardcover
  2016

  $126.02

  This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.