Design for Manufacturability with Advanced Lithography

by Bei Yu (Author), David Z. Pan (Author)

New
Hardcover
2015
$110.54

This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).

Synopsis

This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).

$110.54

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 178
Edition: 1st ed. 2016
Publisher: Springer
Published: 15 Nov 2015
ISBN 10: 3319203843
ISBN 13: 9783319203843

Design for Manufacturability with Advanced Lithography

New

$110.54

Synopsis

$110.54

More Information