by Bernd Schmidt (Author), KlausWetzig (Author)
This book covers ion beam application in modern materials research, offering the basics of ion beam physics and technology and a detailed account of the physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning.
Format: Hardcover
Pages: 418
Edition: 2013
Publisher: Springer
Published: 13 Dec 2012
ISBN 10: 321199355X
ISBN 13: 9783211993552