Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing)

by WeiGao (Author)

New
Hardcover
2010
$265.23

This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.

Synopsis

This book describes the latest optical sensors used to measure angle and displacement in precision nanometrology, and presents scanning-type measuring systems for use in surface forms and stage motions. Coverage includes algorithms and experimental data.

$265.23

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 355
Edition: 1st Edition.
Publisher: Springer
Published: 28 Jun 2010
ISBN 10: 1849962537
ISBN 13: 9781849962537

Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing (Springer Series in Advanced Manufacturing)

New

$265.23

Synopsis

$265.23

More Information