by TongHengLee (Author), KokKiongTan (Author), SunanHuang (Author)
It has been extensively edited and rewritten throughout with the following particular areas being expanded or added:* piezoelectric actuators* fine movement control* gantry-stage control* interpolation of quadrature encoder signals* geometrical error modeling for single-, dual- and general-XY-axis stages.
Format: Hardcover
Pages: 288
Edition: 2nd ed.
Publisher: Springer
Published: 13 Dec 2007
ISBN 10: 1848000200
ISBN 13: 9781848000209