Science and Technology of Chemical Mechanical Planarization (CMP): Volume 1157 (MRS Proceedings)

Science and Technology of Chemical Mechanical Planarization (CMP): Volume 1157 (MRS Proceedings)

by Ashok Kumar (Editor), C . Fred Higgs I I I (Editor), Chad S . Korach (Editor), SubramanianBalakumar (Editor)

Synopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

$125.34

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 165
Publisher: Cambridge University Press
Published: 31 Mar 2010

ISBN 10: 1605111309
ISBN 13: 9781605111308