Hdbk Semic Manutech 2e

by YoshioNishi (Editor), RobertDoering (Editor)

• New

  Hardcover
  2007

  $217.55

  A guide to the individual processes, equipment, and materials of semiconductor manufacturing technologies. It features chapters on silicon materials, SOI materials and devices, surface preparation, ion implantation, dopant diffusion, in-line metrology, yield modeling, photomask fabrication, failure analysis, and damascene copper electroplating.