Advanced Mechatronics and MEMS Devices: 23 (Microsystems)

Advanced Mechatronics and MEMS Devices: 23 (Microsystems)

by Dan Zhang (Editor)

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Format: Paperback
Pages: 264
Edition: 2013
Publisher: Springer
Published: 15 Oct 2014

ISBN 10: 1489997458
ISBN 13: 9781489997456