Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)

Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)

by James K. Olthoff (Contributor), Loucas G. Christophorou (Author)

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Format: Paperback
Pages: 800
Edition: Softcover reprint of the original 1st ed. 2004
Publisher: Springer
Published: 21 Sep 2012

ISBN 10: 1461347416
ISBN 13: 9781461347415