by Zhang (Author)
This book describes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. It also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics.
Format: Hardcover
Pages: 264
Edition: 2013
Publisher: Springer
Published: 14 Sep 2012
ISBN 10: 1441999841
ISBN 13: 9781441999849