by Mohammad I . Younis (Author)
This book presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. In also provides analysis and treatment for the most common static and dynamic phenomena in MEMS.
Format: Hardcover
Pages: 468
Edition: 1st Edition.
Publisher: Springer
Published: 20 Jun 2011
ISBN 10: 1441960198
ISBN 13: 9781441960191