by Allyson L . Hartzell (Author), Mark G .da Silva (Author), HerbertR.Shea (Author)
This book focuses on the reliability and manufacturability of MEMS at a fundamental level. It demonstrates how to design MEMs for reliability and provides detailed information on the different types of failure modes and how to avoid them.
Format: Hardcover
Pages: 291
Edition: 1st Edition.
Publisher: Springer
Published: 10 Nov 2010
ISBN 10: 1441960171
ISBN 13: 9781441960177