Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

by Denis Flandre (Contributor), Denis Flandre (Contributor), Jean Laconte (Author), Jean-Pierre Raskin (Contributor)

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Format: Paperback
Pages: 308
Edition: Softcover reprint of hardcover 1st ed. 2006
Publisher: Springer
Published: 29 Oct 2010

ISBN 10: 1441939571
ISBN 13: 9781441939579