by Scott E. Thompson (Author), Toshikazu Nishida (Author), Yongke Sun (Author)
This text presents the fundamentals and applications of strain in semiconductors and semiconductor devices that is relevant for strain-enhanced advanced CMOS technology and strain-based piezoresistive MEMS transducers.
Format: Hardcover
Pages: 364
Edition: 2010
Publisher: Springer
Published: 04 Dec 2009
ISBN 10: 1441905510
ISBN 13: 9781441905512