by TapanGupta (Author)
In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.
Format: Hardcover
Pages: 444
Edition: 2009
Publisher: Springer
Published: 07 Aug 2009
ISBN 10: 1441900756
ISBN 13: 9781441900753