From MEMS to Bio-MEMS and Bio-NEMS (Fundamentals of Microfabrication and Nanotechnology)

by Marc J . Madou (Author)

• New

  Hardcover
  2011

  $111.26

  Details manufacturing techniques applicable to bio-nanotechnology. Reviewing MEMS techniques, materials, and modeling, this text covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. It discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices.