Solid-state Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology (Fundmentals of Microfabrication and Nanotechnology)

by Marc J . Madou (Author)

• New

  Hardcover
  2011

  $126.38

  Providing a theoretical understanding of MEMS and NEMS, this book covers various aspects of solid state physics behind nanotechnology and science. After exploring the rise of Si, MEMS, and NEMS in a historical context, it discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal.