by UzodinmaOkoroanyanwu (Author)
This book will be of interest to all involved in the semiconductor industry. Offering a complete overview of the topic of lithography it will be of interest to practitioners, researchers and students. Chemists, Electrical Engineers, chip designers and manufacturers. Conferences: OSA, ISSCC, ISCS, EMC, ICASSP.
Format: Hardcover
Pages: 861
Publisher: Wiley-Blackwell
Published: 08 Feb 2011
ISBN 10: 1118030028
ISBN 13: 9781118030028