Nanolithography: The Art of Fabricating Nanoelectronics, Nanophotonics and Nanobiology Devices and Systems (Woodhead Publishing Series in Electronic ... and Nanophotonic Devices and Systems: 42

by Martin Feldman (Editor), Martin Feldman (Author)

• New

  Illustrated
  2013

  $197.47

  Chapters cover lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography, and applications of nanolithography in nanoelectronics, nanophotonics and microfluidics.