by Michael Kraft (Editor), Michael Kraft (Editor), Neil M. White (Editor)
Micro-Electro-Mechanical-Systems (MEMS) are miniature devices or machines, which integrate elements such as actuators, sensors, and a processor to form microsystems.
Format: Hardcover
Pages: 368
Publisher: Woodhead Publishing Ltd
Published: 02 Jan 2013
ISBN 10: 0857091182
ISBN 13: 9780857091185