by Donald M . Mattox (Author)
Explains various aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing.
Format: Hardcover
Pages: 792
Edition: 2
Publisher: William Andrew
Published: 29 Apr 2010
ISBN 10: 0815520379
ISBN 13: 9780815520375