Fabrication & Design of Resonant Microdevices (Micro and Nano Technologies) (Micro and Nano Technologies)

by Behraad Bahreyni (Author)

• New

  Illustrated
  2008

  $115.22

  Discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). This book also covers the issues of damping and noise for resonant MEMS.