by WilliamC.O'Mara (Author), RobertB.Haber (Author), Lee P. Hunt (Author)
A comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. It details various known properties of silicon. It includes a set of binary phase diagrams. It discusses practical aspects such as materials handling, safety, impurity and defect reduction.
Format: Hardcover
Pages: 795
Publisher: William Andrew
Published: 31 Dec 1990
ISBN 10: 0815512376
ISBN 13: 9780815512370