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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions: Fundamentals, Etching, Deposition and Surface ... (Materials Science and Process Technology)

Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions: Fundamentals, Etching, Deposition and Surface ... (Materials Science and Process Technology)

by StephenM.Rossnagel (Author), WilliamD.Westwood (Author), JeromeJ.Haber (Author)

Synopsis

Presents a comprehensive overview of the technology of plasma-based processing.

$181.29

Quantity

20+ in stock

More Information

Format: Hardcover
 Pages: 546
 Publisher: William Andrew
Published: 31 Dec 1990
ISBN 10: 0815512201
ISBN 13: 9780815512202