Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators: 14 (Microsystems, 14)

by Gerhard Lammel (Author), Philippe Renaud (Author), Sandra Schweizer (Author)

• New

  Illustrated
  2002

  $202.39

  Shows how to design and fabricate optical microsystems using technologies and original architectures. This work explains a barcode scanner, laser projection mirror and a microspectrometer, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, and device test to the system assembly.