Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of ... (NATO Science Partnership Sub-Series: 3:)

by EvgeniGusev (Editor), EricGarfunkel (Editor), Alexander Vul ' (Editor)

• New

  Hardcover
  1998

  $229.31

  Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997