by EvgeniGusev (Editor), EricGarfunkel (Editor), Alexander Vul ' (Editor)
Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997
Format: Hardcover
Pages: 520
Edition: illustrated edition
Publisher: Springer
Published: 31 Mar 1998
ISBN 10: 0792350073
ISBN 13: 9780792350071