Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of ... (NATO Science Partnership Sub-Series: 3:)

Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of ... (NATO Science Partnership Sub-Series: 3:)

by EvgeniGusev (Editor), EricGarfunkel (Editor), Alexander Vul ' (Editor)

Synopsis

Proceedings of the NATO Advanced Research Workshop on Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices: Towards an Atomic Scale Understanding, St. Petersburg, Russia, August 4-8, 1997

$225.57

Save:$31.44 (12%)

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 520
Edition: illustrated edition
Publisher: Springer
Published: 31 Mar 1998

ISBN 10: 0792350073
ISBN 13: 9780792350071